Improved extraction of Si substrate parameters from combined I-V and C-V measurements on P-N junction diodes

被引:3
作者
Czerwinski, A
Simoen, E
Vanhellemont, J
Tomaszewski, D
Gibki, J
Bakowski, A
机构
[1] Inst Electron Technol, PL-02668 Warsaw, Poland
[2] IMEC, B-3001 Louvain, Belgium
关键词
silicon; diode; P-N junction;
D O I
10.4028/www.scientific.net/SSP.57-58.477
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Typical equations and methods used for years to analyse a p-n junction assume planar junction, so measured values are often treated just as volume values. Current components of I-V characteristics are sometimes extracted and analysed separately to determine their own parameters. However capacitance values from measured C-V characteristics are usually taken just as planar values and no extraction is done, The influence of combined capacitance and current components separation on p-n junction parameters and importance of capacitance components separation for accurate analyse of diode is shown for typical physical parameters used to characterise a p-n junction.
引用
收藏
页码:477 / 482
页数:6
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