SENSITIVITY EXTREMA IN MULTIPLE-ANGLE ELLIPSOMETRY

被引:38
作者
HUMLICEK, J
机构
关键词
D O I
10.1364/JOSAA.2.000713
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
引用
收藏
页码:713 / 722
页数:10
相关论文
共 7 条
[1]  
Azzam RMA, 1977, ELLIPSOMETRY POLARIZ
[2]   PARAMETER CORRELATION AND PRECISION IN MULTIPLE-ANGLE ELLIPSOMETRY [J].
BUABBUD, GH ;
BASHARA, NM .
APPLIED OPTICS, 1981, 20 (17) :3020-3026
[3]  
EADIE WT, 1971, STATISTICAL METHODS
[4]   MULTIPLE-ANGLE ELLIPSOMETRY OF SI-SIO2 POLYCRYSTALLINE SI SYSTEM [J].
GAILLYOVA, Y ;
SCHMIDT, E ;
HUMLICEK, J .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1985, 2 (05) :723-726
[5]   EVALUATION OF DERIVATIVES OF REFLECTANCE AND TRANSMITTANCE BY STRATIFIED STRUCTURES AND SOLUTION OF THE REVERSE PROBLEM OF ELLIPSOMETRY [J].
HUMLICEK, J .
OPTICA ACTA, 1983, 30 (01) :97-105
[6]   PARAMETER-CORRELATION AND COMPUTATIONAL CONSIDERATIONS IN MULTIPLE-ANGLE ELLIPSOMETRY [J].
IBRAHIM, MM ;
BASHARA, NM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1971, 61 (12) :1622-&
[7]  
WILKINSON JH, 1972, HDB AUTOMATIC COMPUT