OPTICAL-PROPERTIES OF BA(2)NANB5O15 FILM FABRICATED BY RF MAGNETRON SPUTTERING METHOD

被引:19
作者
MASUDA, Y [1 ]
MASUMOTO, H [1 ]
KIDACHI, Y [1 ]
WATADZU, A [1 ]
BABA, A [1 ]
GOTO, T [1 ]
HIRAI, T [1 ]
机构
[1] TOHOKU UNIV,INST MAT RES,AOBA KU,SENDAI,MIYAGI 980,JAPAN
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1995年 / 34卷 / 9B期
关键词
BA(2)NANB(5)O(1)5; 2ND-HARMONIC GENERATION; FERROELECTRIC; THIN FILM; TUNGSTEN-BRONZE; DIELECTRIC CONSTANT; REMANENT POLARIZATION; COERCIVE FIELD; RAMAN SCATTERING;
D O I
10.1143/JJAP.34.5124
中图分类号
O59 [应用物理学];
学科分类号
摘要
Tungsten-bronze-type Ba2NaNb5O15 (BNN) thin films were deposited on fused-quartz and Si substrates. The deposition ratio (Ba:Na:Nb) and rate of the films depend on the sputtering conditions. The dielectric constant and dielectric loss factor are 889 and 0.029, respectively, at room temperature. The leakage current density is about 100 mA/cm(2) at 1 MV/cm. The remanent polarization and coercive field are 2.39 mu C/cm(2) and 8.33 kV/cm, respectively, and the second-harmonic generation coefficient d is about 2.54 x 10(-13) m/V. Moreover, Raman scattering of the BNN films is discussed.
引用
收藏
页码:5124 / 5131
页数:8
相关论文
共 18 条
[1]   DIELECTRIC-PROPERTIES OF (111)LEAD AND (100)LEAD ZIRCONATE-TITANATE FILMS PREPARED BY SOL-GEL TECHNIQUE [J].
AOKI, K ;
FUKUDA, Y ;
NUMATA, K ;
NISHIMURA, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5155-5158
[2]  
FUKAKOSHI H, 1994, JPN J APPL PHYS, V33, P5262
[3]   CURRENT-VOLTAGE CHARACTERISTICS OF ELECTRON-CYCLOTRON-RESONANCE SPUTTER-DEPOSITED SRTIO3 THIN-FILMS [J].
FUKUDA, Y ;
AOKI, K ;
NUMATA, K ;
NISHIMURA, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B) :5255-5258
[4]   RAMAN-SCATTERING STUDIES ON PHASE-TRANSITION IN BARIUM SODIUM NIOBATE AT HIGH-PRESSURE [J].
KOJIMA, S ;
NAKAMURA, T ;
ASAUMI, K ;
TAKASHIGE, M ;
MINOMURA, S .
SOLID STATE COMMUNICATIONS, 1979, 29 (11) :779-783
[5]   RAMAN-SCATTERING STUDY OF BA2NANB5(1-X)TA5XO15 [J].
KOJIMA, S ;
HAMAZAKI, S ;
TSUKIOKA, M ;
TAKASHIGE, M .
JOURNAL OF THE PHYSICAL SOCIETY OF JAPAN, 1993, 62 (04) :1097-1100
[6]   PREPARATION OF BA2NANB5O15 FILM BY RF MAGNETRON SPUTTERING METHOD [J].
MASUDA, Y ;
MASUMOTO, H ;
BABA, A ;
GOTO, T ;
HIRAI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B) :4043-4047
[7]   PREPARATION OF BI4TI3O12 FILMS ON A SINGLE-CRYSTAL SAPPHIRE SUBSTRATE WITH ELECTRON-CYCLOTRON RESONANCE PLASMA SPUTTERING [J].
MASUMOTO, H ;
GOTO, T ;
MASUDA, Y ;
BABA, A ;
HIRAI, T .
APPLIED PHYSICS LETTERS, 1991, 58 (03) :243-245
[8]  
MITSUI T, 1969, LANDOLTBORNSTEIN, V3
[9]  
Miyazaki Y., 1992, Journal of the Institute of Electronics, Information and Communication Engineers, V75, P596
[10]  
NAKAMURA T, 1988, FERROELECTRICITY INV, P27204