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OYSTER - A STUDY OF INTEGRATED-CIRCUITS AS 3-DIMENSIONAL STRUCTURES
被引:19
作者
:
KOPPELMAN, GM
论文数:
0
引用数:
0
h-index:
0
KOPPELMAN, GM
WESLEY, MA
论文数:
0
引用数:
0
h-index:
0
WESLEY, MA
机构
:
来源
:
IBM JOURNAL OF RESEARCH AND DEVELOPMENT
|
1983年
/ 27卷
/ 02期
关键词
:
D O I
:
10.1147/rd.272.0149
中图分类号
:
TP3 [计算技术、计算机技术];
学科分类号
:
0812 ;
摘要
:
引用
收藏
页码:149 / 163
页数:15
相关论文
共 17 条
[1]
FINITE-ELEMENT ANALYSIS OF SEMICONDUCTOR-DEVICES - THE FIELDAY PROGRAM
[J].
BUTURLA, EM
论文数:
0
引用数:
0
h-index:
0
BUTURLA, EM
;
COTTRELL, PE
论文数:
0
引用数:
0
h-index:
0
COTTRELL, PE
;
GROSSMAN, BM
论文数:
0
引用数:
0
h-index:
0
GROSSMAN, BM
;
SALSBURG, KA
论文数:
0
引用数:
0
h-index:
0
SALSBURG, KA
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1981,
25
(04)
:218
-231
[2]
PROCESS DESIGN USING TWO-DIMENSIONAL PROCESS AND DEVICE SIMULATORS
[J].
CHIN, D
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
CHIN, D
;
KUMP, MR
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
KUMP, MR
;
LEE, HG
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
LEE, HG
;
DUTTON, RW
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
DUTTON, RW
.
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1982,
29
(02)
:336
-340
[3]
OFFSET MASKS FOR LIFT-OFF PHOTOPROCESSING
[J].
DOLAN, GJ
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
DOLAN, GJ
.
APPLIED PHYSICS LETTERS,
1977,
31
(05)
:337
-339
[4]
GRIN - INTERACTIVE GRAPHICS FOR MODELING SOLIDS
[J].
FITZGERALD, W
论文数:
0
引用数:
0
h-index:
0
FITZGERALD, W
;
GRACER, F
论文数:
0
引用数:
0
h-index:
0
GRACER, F
;
WOLFE, R
论文数:
0
引用数:
0
h-index:
0
WOLFE, R
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1981,
25
(04)
:281
-294
[5]
GROSSMAN DD, 1976, AIM280 STANF U STANF
[6]
ANALYSIS OF DIMENSIONS AND TOLERANCES IN COMPUTER-AIDED MECHANICAL DESIGN
[J].
HILLYARD, RC
论文数:
0
引用数:
0
h-index:
0
HILLYARD, RC
;
BRAID, IC
论文数:
0
引用数:
0
h-index:
0
BRAID, IC
.
COMPUTER-AIDED DESIGN,
1978,
10
(03)
:161
-166
[7]
RD3D (COMPUTER-SIMULATION OF RESIST DEVELOPMENT IN 3 DIMENSIONS)
[J].
JONES, F
论文数:
0
引用数:
0
h-index:
0
JONES, F
;
PARASZCZAK, J
论文数:
0
引用数:
0
h-index:
0
PARASZCZAK, J
.
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1981,
28
(12)
:1544
-1552
[8]
ALGORITHM FOR PLANNING COLLISION-FREE PATHS AMONG POLYHEDRAL OBSTACLES
[J].
LOZANOPEREZ, T
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LOZANOPEREZ, T
;
WESLEY, MA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
WESLEY, MA
.
COMMUNICATIONS OF THE ACM,
1979,
22
(10)
:560
-570
[9]
CAPACITANCE MODELS FOR INTEGRATED-CIRCUIT METALLIZATION WIRES
[J].
RUEHLI, AE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
RUEHLI, AE
;
BRENNAN, PA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BRENNAN, PA
.
IEEE JOURNAL OF SOLID-STATE CIRCUITS,
1975,
10
(06)
:530
-536
[10]
EFFICIENT CAPACITANCE CALCULATIONS FOR 3-DIMENSIONAL MULTICONDUCTOR SYSTEMS
[J].
RUEHLI, AE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
RUEHLI, AE
;
BRENNAN, PA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
BRENNAN, PA
.
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES,
1973,
MT21
(02)
:76
-82
←
1
2
→
共 17 条
[1]
FINITE-ELEMENT ANALYSIS OF SEMICONDUCTOR-DEVICES - THE FIELDAY PROGRAM
[J].
BUTURLA, EM
论文数:
0
引用数:
0
h-index:
0
BUTURLA, EM
;
COTTRELL, PE
论文数:
0
引用数:
0
h-index:
0
COTTRELL, PE
;
GROSSMAN, BM
论文数:
0
引用数:
0
h-index:
0
GROSSMAN, BM
;
SALSBURG, KA
论文数:
0
引用数:
0
h-index:
0
SALSBURG, KA
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1981,
25
(04)
:218
-231
[2]
PROCESS DESIGN USING TWO-DIMENSIONAL PROCESS AND DEVICE SIMULATORS
[J].
CHIN, D
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
CHIN, D
;
KUMP, MR
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
KUMP, MR
;
LEE, HG
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
LEE, HG
;
DUTTON, RW
论文数:
0
引用数:
0
h-index:
0
机构:
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
HEWLETT PACKARD CO,CUPERTINO IC OPERAT,CUPERTINO,CA 95014
DUTTON, RW
.
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1982,
29
(02)
:336
-340
[3]
OFFSET MASKS FOR LIFT-OFF PHOTOPROCESSING
[J].
DOLAN, GJ
论文数:
0
引用数:
0
h-index:
0
机构:
BELL TEL LABS INC,MURRAY HILL,NJ 07974
BELL TEL LABS INC,MURRAY HILL,NJ 07974
DOLAN, GJ
.
APPLIED PHYSICS LETTERS,
1977,
31
(05)
:337
-339
[4]
GRIN - INTERACTIVE GRAPHICS FOR MODELING SOLIDS
[J].
FITZGERALD, W
论文数:
0
引用数:
0
h-index:
0
FITZGERALD, W
;
GRACER, F
论文数:
0
引用数:
0
h-index:
0
GRACER, F
;
WOLFE, R
论文数:
0
引用数:
0
h-index:
0
WOLFE, R
.
IBM JOURNAL OF RESEARCH AND DEVELOPMENT,
1981,
25
(04)
:281
-294
[5]
GROSSMAN DD, 1976, AIM280 STANF U STANF
[6]
ANALYSIS OF DIMENSIONS AND TOLERANCES IN COMPUTER-AIDED MECHANICAL DESIGN
[J].
HILLYARD, RC
论文数:
0
引用数:
0
h-index:
0
HILLYARD, RC
;
BRAID, IC
论文数:
0
引用数:
0
h-index:
0
BRAID, IC
.
COMPUTER-AIDED DESIGN,
1978,
10
(03)
:161
-166
[7]
RD3D (COMPUTER-SIMULATION OF RESIST DEVELOPMENT IN 3 DIMENSIONS)
[J].
JONES, F
论文数:
0
引用数:
0
h-index:
0
JONES, F
;
PARASZCZAK, J
论文数:
0
引用数:
0
h-index:
0
PARASZCZAK, J
.
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1981,
28
(12)
:1544
-1552
[8]
ALGORITHM FOR PLANNING COLLISION-FREE PATHS AMONG POLYHEDRAL OBSTACLES
[J].
LOZANOPEREZ, T
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LOZANOPEREZ, T
;
WESLEY, MA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
WESLEY, MA
.
COMMUNICATIONS OF THE ACM,
1979,
22
(10)
:560
-570
[9]
CAPACITANCE MODELS FOR INTEGRATED-CIRCUIT METALLIZATION WIRES
[J].
RUEHLI, AE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
RUEHLI, AE
;
BRENNAN, PA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BRENNAN, PA
.
IEEE JOURNAL OF SOLID-STATE CIRCUITS,
1975,
10
(06)
:530
-536
[10]
EFFICIENT CAPACITANCE CALCULATIONS FOR 3-DIMENSIONAL MULTICONDUCTOR SYSTEMS
[J].
RUEHLI, AE
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
RUEHLI, AE
;
BRENNAN, PA
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKSTOWN HEIGHTS,NY 10598
BRENNAN, PA
.
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES,
1973,
MT21
(02)
:76
-82
←
1
2
→