A MANUFACTURING PROCESS FOR ANALOG AND DIGITAL GALLIUM-ARSENIDE INTEGRATED-CIRCUITS

被引:8
作者
VANTUYL, RL
KUMAR, V
DAVANZO, DC
TAYLOR, TW
PETERSON, VE
HORNBUCKLE, DP
FISHER, RA
ESTREICH, DB
机构
关键词
D O I
10.1109/TMTT.1982.1131180
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:935 / 942
页数:8
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