ION-IMPLANTATION IN GAAS

被引：54

作者：

PEARTON, SJ ^{[1
]}

POATE, JM ^{[1
]}

SETTE, F ^{[1
]}

GIBSON, JM ^{[1
]}

JACOBSON, DC ^{[1
]}

WILLIAMS, JS ^{[1
]}

机构：

[1] ROYAL MELBOURNE INST TECHNOL, MELBOURNE, VIC 3000, AUSTRALIA

来源：

关键词：

D O I：

10.1016/S0168-583X(87)80074-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：369 / 380

页数：12

共 65 条

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AUSTIN, MW
[J]. NUCLEAR INSTRUMENTS & METHODS, 1980, 168 (1-3): : 307 - 312
[63] WILLIAMS JS, 1985, MATER RES SOC S P, V35, P427
[64] WILSON MR, 1985, OCT EL SOC M LAS VEG
[65] SELF-COMPENSATION OF DONORS IN HIGH-PURITY GAAS
WOLFE, CM
STILLMAN, GE
[J]. APPLIED PHYSICS LETTERS, 1975, 27 (10) : 564 - 567