METHOD OF DETERMINING DEPTH OF IMPURITIES BY PROTON-INDUCED X-RAYS

被引：16

作者：

BENKA, O ^{[1
]}

GERETSCHLAGER, M ^{[1
]}

PAUL, H ^{[1
]}

机构：

[1] JOHANNES KEPLER UNIV LINZ,INST PHYS,A-4045 LINZ,AUSTRIA

来源：

NUCLEAR INSTRUMENTS & METHODS | 1977年 / 142卷 / 1-2期

关键词：

D O I：

10.1016/0029-554X(77)90812-6

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：83 / 84

页数：2

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BRANDT, W
LAUBERT, R
[J]. PHYSICAL REVIEW A, 1973, 7 (03): : 983 - 1001
[2] DETERMINATION OF DEPTH OF IMPURITY ATOMS IN BULK MATERIAL BY PROTON-INDUCED X-RAYS
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GERETSCHLAGER, M
PAUL, H
[J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (11) : 5090 - 5093
[3] CALCULATION OF PROTON-INDUCED K-SHELL X-RAY YIELD FOR DISTRIBUTED IMPURITY ATOMS IN BULK MATERIAL
KROPF, A
[J]. NUCLEAR INSTRUMENTS & METHODS, 1977, 142 (1-2): : 79 - 81
[4] ION-INDUCED X-RAY SPECTROSCOPY AS A METHOD TO DETERMINE DEPTH DISTRIBUTION OF TRACE-ELEMENTS
PABST, W
[J]. NUCLEAR INSTRUMENTS & METHODS, 1975, 124 (01): : 143 - 147
[5] DEPTH PROFILE DETERMINATION BY ION-INDUCED X-RAY SPECTROSCOPY
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[J]. NUCLEAR INSTRUMENTS & METHODS, 1974, 120 (03): : 543 - 545
[6] FULL-RANGE SOLUTION FOR MEASUREMENT OF THIN-FILM SURFACE DENSITIES WITH PROTON-EXCITED X-RAYS
REUTER, FW
SMITH, HP
[J]. JOURNAL OF APPLIED PHYSICS, 1972, 43 (10) : 4228 - &