DETERMINATION OF DEPTH OF IMPURITY ATOMS IN BULK MATERIAL BY PROTON-INDUCED X-RAYS

被引:23
作者
BENKA, O [1 ]
GERETSCHLAGER, M [1 ]
PAUL, H [1 ]
机构
[1] JOHANNES KEPLER UNIV,INST PHYS,A-4045 LINZ,AUSTRIA
关键词
D O I
10.1063/1.322458
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:5090 / 5093
页数:4
相关论文
共 8 条
[1]   SIMPLE DEPTH PROFILE DETERMINATION BY PROTON-INDUCED X-RAY-EMISSION [J].
AHLBERG, M .
NUCLEAR INSTRUMENTS & METHODS, 1975, 131 (02) :381-384
[2]   MEASUREMENT OF RELATIVE PROTON-INDUCED L-SUBSHELL IONIZATION CROSS-SECTIONS OF AG, SB AND AU [J].
BENKA, O ;
GERETSCHLAGER, M ;
KROPF, A ;
PAUL, H ;
SEMRAD, D .
JOURNAL OF PHYSICS B-ATOMIC MOLECULAR AND OPTICAL PHYSICS, 1976, 9 (05) :779-789
[3]   SENSITIVITY IN TRACE-ELEMENT ANALYSIS BY P, ALPHA AND O-16 INDUCED X-RAYS [J].
FOLKMANN, F ;
BORGGREEN, J ;
KJELDGAARD, A .
NUCLEAR INSTRUMENTS & METHODS, 1974, 119 (01) :117-123
[4]  
Northcliffe L. S., 1970, NUCL DATA A, V7, P233
[5]   ION-INDUCED X-RAY SPECTROSCOPY AS A METHOD TO DETERMINE DEPTH DISTRIBUTION OF TRACE-ELEMENTS [J].
PABST, W .
NUCLEAR INSTRUMENTS & METHODS, 1975, 124 (01) :143-147
[6]   DEPTH PROFILE DETERMINATION BY ION-INDUCED X-RAY SPECTROSCOPY [J].
PABST, W .
NUCLEAR INSTRUMENTS & METHODS, 1974, 120 (03) :543-545
[7]   FULL-RANGE SOLUTION FOR MEASUREMENT OF THIN-FILM SURFACE DENSITIES WITH PROTON-EXCITED X-RAYS [J].
REUTER, FW ;
SMITH, HP .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (10) :4228-&
[8]  
Storm E., 1970, ATOM DATA NUCL DATA, V7, P565, DOI [10.1016/S0092-640X(70)80017-1, DOI 10.1016/S0092-640X(70)80017-1]