DIELECTRIC-BREAKDOWN OF POLYMER-FILMS CONTAINING METAL-CLUSTERS

被引:75
作者
LAURENT, C [1 ]
KAY, E [1 ]
SOUAG, N [1 ]
机构
[1] IBM CORP,ALMADEN RES CTR,SAN JOSE,CA 95193
关键词
D O I
10.1063/1.341433
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:336 / 343
页数:8
相关论文
共 17 条
[1]  
ABELES B, 1975, ADV PHYS, V24, P407, DOI 10.1080/00018737500101431
[2]   CONDUCTION MECHANISM IN PLASMA-POLYMERIZED TETRAFLUOROETHYLENE FILMS [J].
HETZLER, U ;
KAY, E .
JOURNAL OF APPLIED PHYSICS, 1978, 49 (11) :5617-5623
[3]   PLASMA POLYMERIZATION OF FLUOROCARBONS IN RF CAPACITIVELY COUPLED DIODE SYSTEM [J].
KAY, E ;
DILKS, A .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (01) :1-11
[4]   DEFINITION AND USE OF A SPECIFIC VALUE TO CHARACTERIZE THE DIELECTRIC-BREAKDOWN OF THIN INSULATING LAYERS [J].
LACOSTE, R ;
MUHAMMAD, A ;
SEGUI, Y ;
VOUMBOMATOUMONA, L .
IEEE TRANSACTIONS ON ELECTRICAL INSULATION, 1984, 19 (03) :234-240
[5]  
LACOSTE R, 1985, REV GEN ELECTR, V10, P769
[6]   DIFLUOROCARBENE EMISSION-SPECTRA FROM FLUOROCARBON PLASMAS AND ITS RELATIONSHIP TO FLUOROCARBON POLYMER FORMATION [J].
MILLARD, MM ;
KAY, E .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1982, 129 (01) :160-165
[7]  
MONTALAN D, IN PRESS THIN SOLID
[8]  
ODWYER JJ, 1973, THEORY ELECTRICAL CO
[9]   REVERSIBLE ELECTRICAL SWITCHING PHENOMENA IN DISORDERED STRUCTURES [J].
OVSHINSKY, SR .
PHYSICAL REVIEW LETTERS, 1968, 21 (20) :1450-+
[10]   OPTICAL-PROPERTIES AND MICROSTRUCTURE OF GOLD FLUOROCARBON-POLYMER COMPOSITE FILMS [J].
PERRIN, J ;
DESPAX, B ;
KAY, E .
PHYSICAL REVIEW B, 1985, 32 (02) :719-732