PREFERRED CRYSTAL ORIENTATION OF COBALT FERRITE THIN-FILMS INDUCED BY ION-BOMBARDMENT DURING DEPOSITION

被引:111
作者
OKUNO, SN
HASHIMOTO, S
INOMATA, K
机构
[1] Toshiba Research and Development Center, Toshiba Corp., Komukai, Saiwai-ku
关键词
D O I
10.1063/1.350442
中图分类号
O59 [应用物理学];
学科分类号
摘要
Thin films of CoxFe3-xO4-y (x=0.8, 1.0, 1.15, 1.25, 1.5, 1.8) were prepared under 100-500 eV Ar+ -ion bombardment during film deposition. Strong crystallization enhancement and preferred crystallographic orientation were observed as the effects of ion bombardment. Crystal orientation normal to the substrate depended on the composition x; [110]-axis orientation was obtained for x=0.8 and 1.0 and [111] orientation for x=1.15, 1.25, 1.5, and 1.8. The orientation was not affected significantly by the incident angle of the ions and did not vary with ion energy in the range 100-500 eV. The mechanism of crystal orientation is thought to have a close relationship with the preferential sputtering of oxygen by Ar+-ion impact.
引用
收藏
页码:5926 / 5929
页数:4
相关论文
共 17 条
[1]   MAGNETO-OPTIC KERR EFFECT IN COFE2-XMXO4(M=MN,CR,AL) AND BAFE12-2X-COXTIXO19 WITH TETRAHEDRALLY COORDINATED CO2+ [J].
ABE, M ;
GOMI, M .
JOURNAL OF APPLIED PHYSICS, 1982, 53 (11) :8172-8174
[2]   MAGNETO-OPTIC INSULATORS UTILIZING OPTICAL-ACTIVITY OF CO++(TD) [J].
AHRENKIEL, R ;
COBURN, T .
IEEE TRANSACTIONS ON MAGNETICS, 1975, 11 (05) :1103-1108
[3]   THEORY OF THIN-FILM ORIENTATION BY ION-BOMBARDMENT DURING DEPOSITION [J].
BRADLEY, RM ;
HARPER, JME ;
SMITH, DA .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (12) :4160-4164
[4]   ION-BEAM-INDUCED TEXTURE FORMATION IN VACUUM-CONDENSED THIN METAL-FILMS [J].
DOBREV, D .
THIN SOLID FILMS, 1982, 92 (1-2) :41-53
[5]   CO-FERRITE - NEW MAGNETO-OPTIC RECORDING MATERIAL [J].
EVTIHIEV, NN ;
ECONOMOV, NA ;
KREBS, AR ;
ZAMJATINA, NA ;
BAURIN, VD ;
PINKO, VG .
IEEE TRANSACTIONS ON MAGNETICS, 1976, 12 (06) :773-775
[6]  
Harper J.M.E., 1984, ION BOMBARDMENT MODI
[7]   TECHNOLOGY AND APPLICATIONS OF BROAD-BEAM ION SOURCES USED IN SPUTTERING .2. APPLICATIONS [J].
HARPER, JME ;
CUOMO, JJ ;
KAUFMAN, HR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :737-756
[8]   THIN-FILM ANNEALING BY ION-BOMBARDMENT [J].
HIRSCH, EH ;
VARGA, IK .
THIN SOLID FILMS, 1980, 69 (01) :99-105
[9]   EFFECT OF ION-BOMBARDMENT ON INITIAL-STAGES OF THIN-FILM GROWTH [J].
MARINOV, M .
THIN SOLID FILMS, 1977, 46 (03) :267-274
[10]   COBALT FERRITE THIN-FILMS FOR MAGNETO-OPTICAL RECORDING [J].
MARTENS, JWD ;
VOERMANS, AB .
IEEE TRANSACTIONS ON MAGNETICS, 1984, 20 (05) :1007-1012