SPECTROSCOPIC ELLIPSOMETRIC MEASUREMENTS OF THE DIELECTRIC FUNCTION OF GERMANIUM DIOXIDE FILMS ON CRYSTAL GERMANIUM

被引：36

作者：

HU, YZ ^{[1
]}

ZETTLER, JT ^{[1
]}

CHONGSAWANGVIROD, S ^{[1
]}

WANG, YQ ^{[1
]}

IRENE, EA ^{[1
]}

机构：

[1] TECH UNIV BERLIN,INST SOLID STATE PHYS,W-1000 BERLIN 12,GERMANY

来源：

APPLIED PHYSICS LETTERS | 1992年 / 61卷 / 09期

关键词：

D O I：

10.1063/1.107680

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

From spectroscopic ellipsometry measurements in the 1.5-5.7 eV photon energy range we determined the complex dielectric function of thermally grown germanium dioxide in the 1.0-6.3 eV range. A Kramers-Kronig consistent dispersion formula utilizing an exponential-shaped optical band edge was used in conjunction with both previously published far ultraviolet absorbance data for amorphous GeO2 and our spectra. These measurements show that epsilon-2 for GeO2 can be regarded to be zero in the range of E < 5.5 eV, which differs from a previous report. Using these new optical results for the investigation of oxide growth, we find that GeO2 grows via a parabolic growth law with a growth constant, k(p)=1.2 X 10(-19) m2 s-1 at 550-degrees-C.

引用

页码：1098 / 1100

页数：3

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