TIME CONSTANTS AND REACTION CROSS-SECTIONS CHARACTERIZING FILM DEPOSITION BY BEAM-INDUCED POLYMERIZATION

被引：3

作者：

FRITZSCHE, CR

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 06期

关键词：

D O I：

10.1063/1.337173

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2182 / 2184

页数：3

共 8 条

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