学术探索
学术期刊
新闻热点
数据分析
智能评审
立即登录
COMPOSITION AND DETECTION OF ALIGNMENT MARKS FOR ELECTRON-BEAM LITHOGRAPHY
被引:18
作者
:
WOLF, ED
论文数:
0
引用数:
0
h-index:
0
机构:
HUGHES RES LABS,MALIBU,CA 90265
HUGHES RES LABS,MALIBU,CA 90265
WOLF, ED
[
1
]
COANE, PJ
论文数:
0
引用数:
0
h-index:
0
机构:
HUGHES RES LABS,MALIBU,CA 90265
HUGHES RES LABS,MALIBU,CA 90265
COANE, PJ
[
1
]
OZDEMIR, FS
论文数:
0
引用数:
0
h-index:
0
机构:
HUGHES RES LABS,MALIBU,CA 90265
HUGHES RES LABS,MALIBU,CA 90265
OZDEMIR, FS
[
1
]
机构
:
[1]
HUGHES RES LABS,MALIBU,CA 90265
来源
:
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY
|
1975年
/ 12卷
/ 06期
关键词
:
D O I
:
10.1116/1.568514
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:1266 / 1270
页数:5
相关论文
共 16 条
[11]
AUTOMATIC POSITIONING OF DEVICE ELECTRODES USING SCANNING ELECTRON MICROSCOPE
WELLS, OC
论文数:
0
引用数:
0
h-index:
0
WELLS, OC
EVERHART, TE
论文数:
0
引用数:
0
h-index:
0
EVERHART, TE
MATTA, RK
论文数:
0
引用数:
0
h-index:
0
MATTA, RK
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1965,
ED12
(10)
: 556
-
&
[12]
ELECTRON BEAM CHANNELING IN SINGLE-CRYSTAL SILICON BY SCANNING ELECTRON MICROSCOPY
WOLF, ED
论文数:
0
引用数:
0
h-index:
0
WOLF, ED
EVERHART, TE
论文数:
0
引用数:
0
h-index:
0
EVERHART, TE
[J].
APPLIED PHYSICS LETTERS,
1969,
14
(10)
: 299
-
&
[13]
WOLF ED, 1973, J VAC SCI TECHNOL, V10, P1065
[14]
WOLF ED, 1970, 3 ANN STER COLL KENT, P99
[15]
ZWORYKIN VK, 1954, TELEVISION
[16]
1973, DAAB0571C3715 CONTR
←
1
2
→
共 16 条
[11]
AUTOMATIC POSITIONING OF DEVICE ELECTRODES USING SCANNING ELECTRON MICROSCOPE
WELLS, OC
论文数:
0
引用数:
0
h-index:
0
WELLS, OC
EVERHART, TE
论文数:
0
引用数:
0
h-index:
0
EVERHART, TE
MATTA, RK
论文数:
0
引用数:
0
h-index:
0
MATTA, RK
[J].
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1965,
ED12
(10)
: 556
-
&
[12]
ELECTRON BEAM CHANNELING IN SINGLE-CRYSTAL SILICON BY SCANNING ELECTRON MICROSCOPY
WOLF, ED
论文数:
0
引用数:
0
h-index:
0
WOLF, ED
EVERHART, TE
论文数:
0
引用数:
0
h-index:
0
EVERHART, TE
[J].
APPLIED PHYSICS LETTERS,
1969,
14
(10)
: 299
-
&
[13]
WOLF ED, 1973, J VAC SCI TECHNOL, V10, P1065
[14]
WOLF ED, 1970, 3 ANN STER COLL KENT, P99
[15]
ZWORYKIN VK, 1954, TELEVISION
[16]
1973, DAAB0571C3715 CONTR
←
1
2
→