NORMALLY-ON GAAS/ALAS MULTIPLE-WELL FABRY-PEROT REFLECTION MODULATORS FOR LARGE 2-DIMENSIONAL ARRAYS

We report normal-incident normally-on 90 angstrom GaAs/21 angstrom AlAs multiple-quantum-well Fabry-Perot reflection modulators operating at the same wavelength with the same reverse bias over much of a 2 in. wafer. The fabricated modulators achieve ON/OFF reflectance changes larger than 48% and ON/OFF contrast ratios larger than 14.7 over a diameter of 31 mm at the wavelength of 845 nm with a fixed bias of 7 V. Over a diameter of 40 mm, these modulators achieve reflectance changes larger than 43.2% and contrast ratios larger than 5.