CHARACTERIZATION OF ION BEHAVIOR IN TI CATHODE N-2 VACUUM-ARC USING PLANE PROBE DIAGNOSTICS AND SPECTROSCOPIC MEASUREMENTS

This study characterizes ion behavior of cathodic arc plasmas which have been used for the TiN coating. The ion currents are measured using a plane probe. The probe plane is vertical and parallel to the are axis. Spectral intensities of Ti+ and Ti++ ions are also measured as a function of pressure (0.01-30 Pa). As a result of these measurements, it was found that at pressures below 0.1 Pa, the predominant ions in the plasma are Ti++ which have a tendency to be directional or to have a beam component, whereas at pressures above 0.1 Pa, mainly Ti+ ions of random motion are present. (C) 1995 American Institute of Physics.