FULLY-AUTOMATIC APPARATUS FOR THE DETERMINATION OF DOPING PROFILES IN SI BY ELECTRICAL MEASUREMENTS AND ANODIC-STRIPPING

被引：33

作者：

GALLONI, R

SARDO, A

机构：

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1983年 / 54卷 / 03期

关键词：

D O I：

10.1063/1.1137376

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：369 / 373

页数：5

共 18 条

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