CRYSTALLINE EFFECTS IN SINGLE-CRYSTAL AND HIGHLY TEXTURED TINX FILMS

被引：15

作者：

STRANDBERG, C

PERRY, AJ

机构：

[1] GTE Valenite Corp, United States

来源：

SURFACE AND INTERFACE ANALYSIS | 1988年 / 12卷 / 1-12期

关键词：

D O I：

10.1002/sia.740120213

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：131 / 136

页数：6

共 19 条

[1] RANGES OF SOME LIGHT-IONS MEASURED BY (P, GAMMA) RESONANCE BROADENING [J].

ANTTILA, A ;

BISTER, M ;

FONTELL, A ;

WINTERBON, KB .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 33 (01) :13-19

[2] CRYSTALLINE EFFECTS IN AUGER-ELECTRON SPECTROSCOPY [J].

BISHOP, HE ;

CHORNIK, B ;

LEGRESSUS, C ;

LEMOEL, A .

SURFACE AND INTERFACE ANALYSIS, 1984, 6 (03) :116-128

[3]

CHOLLET L, 1980, ELEC MICR, V3, P164

[4] QUANTITATIVE AUGER-ELECTRON ANALYSIS OF TITANIUM NITRIDES [J].

DAWSON, PT ;

TZATZOV, KK .

SURFACE SCIENCE, 1985, 149 (01) :105-118

[5] CHANNELING EFFECTS IN POLYCRYSTALLINE COPPER - A SERIOUS IMPEDIMENT TO QUANTITATIVE AUGER ANALYSIS [J].

DOERN, FE ;

KOVER, L ;

MCINTYRE, NS .

SURFACE AND INTERFACE ANALYSIS, 1984, 6 (06) :282-285

[6] X-RAY PHOTOELECTRON AND AUGER-ELECTRON FORWARD SCATTERING - A NEW TOOL FOR STUDYING EPITAXIAL-GROWTH AND CORE-LEVEL BINDING-ENERGY SHIFTS [J].

EGELHOFF, WF .

PHYSICAL REVIEW B, 1984, 30 (02) :1052-1055

[7] LOW-ENERGY ION IRRADIATION DURING FILM GROWTH FOR REDUCING DEFECT DENSITIES IN EPITAXIAL TIN(100) FILMS DEPOSITED BY REACTIVE-MAGNETRON SPUTTERING [J].

HULTMAN, L ;

HELMERSSON, U ;

BARNETT, SA ;

SUNDGREN, JE ;

GREENE, JE .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (02) :552-555

[8] AUGER-ELECTRON SPECTROSCOPY AND RUTHERFORD BACKSCATTERING SPECTROSCOPY STUDIES OF TIN AND TIC COATINGS PREPARED BY THE ACTIVATED REACTIVE EVAPORATION PROCESS [J].

KAUFHERR, N ;

FENSKE, GR ;

BUSCH, DE ;

LIN, P ;

DESHPANDEY, C ;

BUNSHAH, RF .

THIN SOLID FILMS, 1987, 153 :149-157

[9] FORMATION OF THICK TITANIUM CARBIDE FILMS BY HOLLOW-CATHODE DISCHARGE REACTIVE DEPOSITION PROCESS [J].

KOMIYA, S ;

UMEZU, N ;

NARUSAWA, T .

THIN SOLID FILMS, 1978, 54 (01) :51-60

[10] THE CHEMICAL-ANALYSIS OF TIN FILMS - A ROUND-ROBIN EXPERIMENT [J].

PERRY, AJ ;

STRANDBERG, C ;

SPROUL, WD ;

HOFMANN, S ;

ERNSBERGER, C ;

NICKERSON, J ;

CHOLLET, L .

THIN SOLID FILMS, 1987, 153 :169-183

← 1 2 →