THE OCCURRENCE OF CROSS HATCH DURING GAAS HOMOEPITAXY

被引：6

作者：

CUNNINGHAM, JE

CHIU, TH

OURMAZD, A

SHAH, J

TSANG, WT

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 12期

关键词：

D O I：

10.1063/1.337500

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：4165 / 4168

页数：4

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