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GAS-PHASE REACTIONS IN PLASMAS OF SF6 WITH O2 - REACTIONS OF F WITH SOF2 AND SO2 AND REACTIONS OF O WITH SOF2

被引：22
作者：
PLUMB, IC
RYAN, KR
机构：
来源：
PLASMA CHEMISTRY AND PLASMA PROCESSING | 1989年 / 9卷 / 03期
关键词：
D O I：
10.1007/BF01083675
中图分类号：
TQ [化学工业];
学科分类号：
0817 ;
摘要：
引用
收藏
页码：409 / 420
页数：12
相关论文
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[14]   PLASMA-ASSISTED ETCHING MECHANISMS - THE IMPLICATIONS OF REACTION PROBABILITY AND HALOGEN COVERAGE [J].
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