MODELING OF EPITAXIAL THIN-FILM GROWTH ON FCC(100) SUBSTRATES AT LOW-TEMPERATURES

被引:28
作者
EVANS, JW
机构
[1] IOWA STATE UNIV SCI & TECHNOL,DEPT MATH,AMES,IA 50011
[2] IOWA STATE UNIV SCI & TECHNOL,DEPT PHYS,AMES,IA 50011
关键词
D O I
10.1016/0042-207X(90)90390-K
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Long-lived diffracted intensity oscillations have been observed experimentally during thin-film deposition in several systems at temperatures below which thermally-activated diffusion is thought operative. Several models are presented for growth on fcc(100) substrates which can account for these observations. The requirement of a four-fold hollow, rather than atop, adsorption site dramatically influences film structure. Distinct, but short-lived, oscillations are found here even for random immobile adsorption. The prescription of deposition dynamics is also fundamental. Introducing a 'downward funneling' propensity, very short-range 'transient mobility' after deposition, or 'knockout mechanisms' greatly enhances the quasi-steady nature of film growth. The latter is reflected in a slowly-increasing or quasi-periodic film interface width. Long-lived intensity oscillations are also produced, despite the absence of any long-range mobility. © 1990 Pergamon Press plc.
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页码:479 / 481
页数:3
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