CHEMICAL-ANALYSIS OF SURFACES BY TOTAL-REFLECTION-ANGLE X-RAY SPECTROSCOPY IN RHEED EXPERIMENTS (RHEED-TRAXS)

被引：107

作者：

HASEGAWA, S ^{[1
]}

INO, S ^{[1
]}

YAMAMOTO, Y ^{[1
]}

DAIMON, H ^{[1
]}

机构：

[1] UNIV TOKYO,FAC SCI,DEPT PHYS,BUNKYO KU,TOKYO 113,JAPAN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1985年 / 24卷 / 06期

关键词：

ELECTRONS; -; Diffraction; SPECTROSCOPY; X-RAY; Applications;

D O I：

10.1143/JJAP.24.L387

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A new method for chemical analysis of surfaces by total-reflection-angle X-ray spectroscopy in RHEED experiments (RHEED-TRAXS) has been developed. When the X-ray take-off angle is set to be the critical angle for total reflection of the characteristic X-ray emitted from the deposited atoms on surfaces, the detection efficiency for the deposit becomes drastically higher owing to the refraction effect of the X-ray. This enhancement of surface sensitivity is demonstrated with Ag on Si(111). The smallest detectable amount of Ag is about 0. 01 monolayer or less. This sensitivity is comparable to or higher than that of AES.

引用

页码：L387 / L390

页数：4

共 9 条

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