CLOSE SPATIAL CORRELATION AND CHEMICAL EFFECTS IN ANNEALING OF PARAMAGNETIC OXYGEN VACANCIES (E1' CENTERS) IN ION-IMPLANTED AMORPHOUS SIO2

被引：5

作者：

GOLANSKI, A

PFISTER, JC

NICOLLE, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 04期

关键词：

D O I：

10.1063/1.336546

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1096 / 1102

页数：7

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