COMPARISON OF AUGER SPATIAL-RESOLUTION GIVEN BY DIFFERENT PROBE-FORMING SYSTEMS

被引：11

作者：

MORIN, P

机构：

来源：

JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA | 1985年 / 37卷 / 02期

关键词：

D O I：

10.1016/0368-2048(85)80089-X

中图分类号：

O433 [光谱学];

学科分类号：

0703 ; 070302 ;

摘要：

引用

页码：171 / 179

页数：9

共 13 条

[1] MATHEMATICAL AND PHYSICAL CONSIDERATIONS ON THE SPATIAL-RESOLUTION IN SCANNING AUGER-ELECTRON MICROSCOPY [J].

CAZAUX, J .

SURFACE SCIENCE, 1983, 125 (02) :335-354

[2] MONTE-CARLO CALCULATIONS OF SPATIAL-RESOLUTION IN A SCANNING AUGER-ELECTRON MICROSCOPE [J].

ELGOMATI, MM ;

PRUTTON, M .

SURFACE SCIENCE, 1978, 72 (03) :485-494

[3]

FONTAINE G, MICROANALYSIS SCANNI, P28

[4]

GOLDSTEIN JI, 1975, PRACTICAL SCANNING E, P60

[5] NEW METHOD FOR RANGE MEASUREMENTS OF LOW-ENERGY ELECTRONS IN SOLIDS [J].

HOLLIDAY, JE ;

STERNGLASS, EJ .

JOURNAL OF APPLIED PHYSICS, 1959, 30 (09) :1428-1431

[6] EFFECT OF BACKSCATTERED ELECTRONS ON RESOLUTION OF SCANNING AUGER MICROSCOPY [J].

JANSSEN, AP ;

VENABLES, JA .

SURFACE SCIENCE, 1978, 77 (02) :351-364

[7] INFLUENCE OF BACKSCATTERED ELECTRONS ON LATERAL RESOLUTION IN SCANNING AUGER MICROSCOPY [J].

KIRSCHNER, J .

APPLIED PHYSICS, 1977, 14 (04) :351-354

[8] AN ELECTROSTATIC-FIELD EMISSION MICROSCOPE FOR SPECTROSCOPIC AUGER-ELECTRON ANALYSIS [J].

MORIN, P ;

SIMONDET, F .

JOURNAL DE PHYSIQUE, 1984, 45 (NC-2) :307-308

[9] MONTE CARLO CALCULATIONS ON ELECTRON SCATTERING IN A SOLID TARGET [J].

MURATA, K ;

MATSUKAWA, T ;

SHIMIZU, R .

JAPANESE JOURNAL OF APPLIED PHYSICS, 1971, 10 (06) :678-+

[10] CROSS-SECTIONS FOR IONIZATION OF INNER-SHELL ELECTRONS BY ELECTRONS [J].

POWELL, CJ .

REVIEWS OF MODERN PHYSICS, 1976, 48 (01) :33-47

← 1 2 →