DEPTH PROFILING ON A SPUTTERED BEVEL OF SUB-DEGREE SLOPE ANGLE

被引：14

作者：

GRIES, WH

机构：

[1] CSIR, Natl Inst for Materials, Research, Pretoria, S Afr, CSIR, Natl Inst for Materials Research, Pretoria, S Afr

来源：

SURFACE AND INTERFACE ANALYSIS | 1985年 / 7卷 / 01期

关键词：

D O I：

10.1002/sia.740070107

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：29 / 34

页数：6

共 13 条

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