ION-BOMBARDMENT INDUCED SURFACE-TOPOGRAPHY MODIFICATION OF CLEAN AND CONTAMINATED SINGLE-CRYSTAL CU AND SI

被引：28

作者：

LEWIS, GW

KIRIAKIDES, G

CARTER, G

NOBES, MJ

机构：

来源：

关键词：

D O I：

10.1002/sia.740040404

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：141 / 150

页数：10

共 30 条

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