INVESTIGATION OF INTERFACIAL ROUGHNESS OF INXGA1-XAS EPITAXIAL LAYERS ON GAAS AND INP SUBSTRATES BY SOFT-X-RAY REFLECTIVITY

被引:10
作者
KROL, A [1 ]
RESAT, H [1 ]
SHER, CJ [1 ]
WORONICK, SC [1 ]
NG, W [1 ]
KAO, YH [1 ]
COLE, TL [1 ]
GREEN, AK [1 ]
LOWEMA, CK [1 ]
NEE, TW [1 ]
REHN, V [1 ]
机构
[1] USN,CTR WEAP,RES DEPT,DIV PHYS,CHINA LAKE,CA 93555
关键词
D O I
10.1063/1.347338
中图分类号
O59 [应用物理学];
学科分类号
摘要
The grazing incidence x-ray reflectivity is a nondestructive and sensitive technique for probing the depth profile of electron density in layered structures. This method has been utilized in the soft x-ray regime to determine the roughness of interfaces, and the epilayer thickness in In(x)Ga(1-x)As/InP and In(x)Ga(1-x)As/GaAs heterostructures, for x = 0.57 and x = 0.60, grown by molecular beam epitaxy. By fitting the experimental results to our model, assuming uncorrelated interfacial roughness, we conclude that the top surface roughness does not depend on the type of the substrate or presence of stress in the epilayer, and is always smaller than interfacial roughness. The main factors which control the interfacial roughness are the quality of substrate and/or growth conditions rather than strain or lattice mismatch.
引用
收藏
页码:949 / 953
页数:5
相关论文
共 31 条
[1]  
Beckmann P., 1963, SCATTERING ELECTROMA
[2]   KINETICS OF ISLAND FORMATION AT THE INTERFACES OF ALGAAS/GAAS/ALGAAS QUANTUM-WELLS UPON GROWTH INTERRUPTION [J].
BIMBERG, D ;
MARS, D ;
MILLER, JN ;
BAUER, R ;
OERTEL, D ;
CHRISTEN, J .
SUPERLATTICES AND MICROSTRUCTURES, 1987, 3 (01) :79-82
[3]   SCATTERING FROM MULTILAYER THIN-FILMS - THEORY AND EXPERIMENT [J].
BOUSQUET, P ;
FLORY, F ;
ROCHE, P .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (09) :1115-1123
[4]   MOLECULAR-BEAM EPITAXIAL-GROWTH AND CHARACTERIZATION OF PSEUDOMORPHIC INAS/IN0.52 AL0.48 AS QUANTUM WELLS [J].
DEMIGUEL, JL ;
MEYNADIER, MH ;
TAMARGO, MC ;
NAHORY, RE ;
HWANG, DM .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (02) :617-619
[5]   RELATION BETWEEN THE ANGULAR-DEPENDENCE OF SCATTERING AND THE STATISTICAL PROPERTIES OF OPTICAL-SURFACES [J].
ELSON, JM ;
BENNETT, JM .
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1979, 69 (01) :31-47
[6]   QUANTUM SIZE EFFECTS IN GAAS/GAASXP1-X STRAINED-LAYER SUPERLATTICES [J].
GOURLEY, PL ;
BIEFELD, RM .
APPLIED PHYSICS LETTERS, 1984, 45 (07) :749-751
[7]   AN INVESTIGATION OF INXGA1-XAS/GAAS QUANTUM WELLS GROWN BY MOLECULAR-BEAM EPITAXY [J].
JEONG, J ;
SHAHID, MA ;
LEE, JC ;
SCHLESINGER, TE ;
MILNES, AG .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (11) :5464-5468
[8]   CORRELATION OF OPTICAL-SPECTRA AND ATOMIC SCALE STRUCTURE OF ALINAS-GAINAS QUANTUM-WELLS [J].
JUHL, A ;
OERTEL, D ;
MACZEY, C ;
BIMBERG, D ;
CAREY, K ;
HULL, R ;
REID, GA .
SUPERLATTICES AND MICROSTRUCTURES, 1987, 3 (03) :205-209
[9]   THE NATIONAL SYNCHROTRON LIGHT-SOURCE VUV AND SOFT-X-RAY BEAM LINES - PERFORMANCE-CHARACTERISTICS [J].
KLAFFKY, RW ;
HOWELLS, MR ;
WILLIAMS, GP ;
TAKACS, PZ ;
GODEL, JB .
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 195 (1-2) :155-162
[10]   INFLUENCE OF COUPLING OF WELLS ON SPONTANEOUS EMISSION-LINE SHAPE IN GAAS/GAALAS MULTIPLE QUANTUM WELLS [J].
KRAHL, M ;
CHRISTEN, J ;
BIMBERG, D ;
WEIMANN, G ;
SCHLAPP, W .
APPLIED PHYSICS LETTERS, 1988, 52 (10) :798-800