CORRELATION BETWEEN THE ION-BOMBARDMENT DURING FILM GROWTH OF PD FILMS AND THEIR STRUCTURAL AND ELECTRICAL-PROPERTIES

被引：68

作者：

ZIEMANN, P

KAY, E

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1983年 / 1卷 / 02期

关键词：

D O I：

10.1116/1.571920

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：512 / 516

页数：5

共 17 条

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