ATOM-PROBE COMPOSITIONAL ANALYSIS OF CO-CR SPUTTERED MAGNETIC THIN-FILMS

被引：30

作者：

HONO, K

BABU, SS

MAEDA, Y

HASEGAWA, N

SAKURAI, T

机构：

[1] Institute for Materials Research, Tohoku University

来源：

APPLIED PHYSICS LETTERS | 1993年 / 62卷 / 20期

关键词：

D O I：

10.1063/1.109336

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A Co-22 at. % magnetic thin film, sputter deposited on a heated Cu coated Si substrate, was analyzed in the planar direction of the film by atom probe field ion microscopy (APFIM). The atom probe concentration depth profile convincingly showed that the film contained two phases, one enriched in Cr up to 30-35 at. % and the other enriched in Co up to 95-93 at. %. This result indicates that Co-22 at. % Cr thin film deposited on a heated substrate consists of ferromagnetic and paramagnetic phases, each less than a few tens of nanometers in size.

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页码：2504 / 2506

页数：3

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