DIRECT EVIDENCE FOR COMPOSITIONAL FLUCTUATION IN SPUTTERED CO-CR THIN-FILMS

被引：20

作者：

HONO, K ^{[1
]}

MAEDA, Y ^{[1
]}

LI, JL ^{[1
]}

SAKURAI, T ^{[1
]}

机构：

[1] NIPPON TELEGRAPH & TEL PUBL CORP, BASIC RES LAB, TOKAI, IBARAKI 31911, JAPAN

来源：

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 1992年 / 110卷 / 03期

关键词：

D O I：

10.1016/0304-8853(92)90208-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nano-scale concentration fluctuations in sputtered Co-23 at% Cr magnetic thin films were analyzed by atom probe field ion microscopy (APFIM). The atom probe concentration depth profile obtained from the film which was deposited on the W tip at 200-degrees-C clearly showed that the composition fluctuated significantly. The concentration of the Cr enriched region was in the range of 30-40 at% Cr, while that of the Cr depleted region was in the range of 5-10 at% Cr. This result proves that compositional fluctuations are present inside the grains of the Co-Cr sputtered film as suggested by the TEM observation of the chrysanthemum-like pattern (CP) structure.

引用

页码：L254 / L258

页数：5

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