SOME UNCONVENTIONAL EXPERIMENTS CROSS CORRELATING THE TECHNIQUES IN SURFACE-ANALYSIS

Core electron loss spectroscopy (CELS) can be developed in parallel with Auger spectroscopy on the same specimen. Correlating the two spectroscopies improves the chemical information obtained. It also improves the quantification of the Auger spectroscopy because it allows to distinguish between a stratified specimen and a homogeneous one. The ultimate correlation is the development of a coincidence technique between energy loss electrons and Auger electrons. Correlating Auger spectroscopy and X-ray emission spectroscopy of coatings allows to evaluate their thickness from a fraction of an atomic layer up to a fraction of a micron. The determination of the Auger backscattering factor can be easily obtained by performaing EDX experiments in a scanning electron microscope. High lateral resolution X-ray photoelectron spectra and images of thin films may also be obtained in a slightly modified Auger spectrometer allowing to correlate XPS, Auger and CELS information about the same specimen. XPS by backfoil excitation allows also to study radiation damage and charging effects that may occur on sensitive specimens when the lateral resolution of XPS is improved. All the proposed experiments do not require the use of sophisticated instruments but only a standard Auger equipment.