MECHANISMS OF ATOMIC ION EMISSION DURING SPUTTERING

被引：193

作者：

YU, ML

LANG, ND

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 14卷 / 4-6期

关键词：

D O I：

10.1016/0168-583X(86)90135-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：403 / 413

页数：11

共 61 条

[1] DISCRETENESS-OF-CHARGE ADSORPTION MICROPOTENTIALS .2. SINGLE IMAGING [J].

BARLOW, CA ;

MACDONAL.JR .

JOURNAL OF CHEMICAL PHYSICS, 1965, 43 (08) :2575-&

[2] ENERGY-SPECTRA OF SECONDARY IONS EMITTED DURING ION-BOMBARDMENT [J].

BAYLY, AR ;

MACDONALD, RJ .

RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1977, 34 (04) :169-181

[3]

BERNHEIM M, 1981, J MICROSC SPECT ELEC, V6, P141

[4] EXPERIMENTAL AND THEORETICAL APPROACHES TO THE IONIZATION PROCESS IN SECONDARY-ION EMISSION [J].

BLAISE, G ;

NOURTIER, A .

SURFACE SCIENCE, 1979, 90 (02) :495-547

[5]

BLANDIN A, 1976, J PHYS, V37, P396

[6] CHARGE-EXCHANGE IN ATOM-SURFACE SCATTERING - THERMAL VERSUS QUANTUM-MECHANICAL NON-ADIABATICITY [J].

BRAKO, R ;

NEWNS, DM .

SURFACE SCIENCE, 1981, 108 (02) :253-270

[7] MECHANISM OF SIMS MATRIX EFFECT [J].

DELINE, VR ;

KATZ, W ;

EVANS, CA .

APPLIED PHYSICS LETTERS, 1978, 33 (09) :832-835

[8] ION NEUTRALIZATION IN SECONDARY ION MASS-SPECTROMETRY [J].

GARRETT, RF ;

MACDONALD, RJ ;

OCONNOR, DJ .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1983, 218 (1-3) :333-335

[9] THEORY OF CHARGE-TRANSFER FOR DESORPTION OF IONS FROM SURFACES [J].

GARRISON, BJ ;

DIEBOLD, AC ;

LIN, JH ;

SROUBEK, Z .

SURFACE SCIENCE, 1983, 124 (2-3) :461-488

[10] DESIGN AND PERFORMANCE OF AN ENERGY-RESOLVED AND ANGLE-RESOLVED SECONDARY ION MASS-SPECTROMETER [J].

GIBBS, RA ;

WINOGRAD, N .

REVIEW OF SCIENTIFIC INSTRUMENTS, 1981, 52 (08) :1148-1155

← 1 2 3 4 5 6 7 →