MECHANISMS OF ATOMIC ION EMISSION DURING SPUTTERING

被引：193

作者：

YU, ML

LANG, ND

机构：

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1986年 / 14卷 / 4-6期

关键词：

D O I：

10.1016/0168-583X(86)90135-7

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：403 / 413

页数：11

共 61 条

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