DEEXCITATION PROCESSES NEAR-SURFACE OF ION BOMBARDED SIO2 AND SI

被引:39
作者
MARTIN, PJ
BAYLY, AR
MACDONALD, RJ
TOLK, NH
CLARK, GJ
KELLY, JC
机构
[1] AUSTRALIAN NATL UNIV, DEPT PHYS, CANBERRA 2601, ACT, AUSTRALIA
[2] BELL TEL LABS INC, MURRAY HILL, NJ 07974 USA
[3] CSIRO, DIV MINERAL PHYS, N RYDE 2113, NEW S WALES, AUSTRALIA
[4] UNIV NEW S WALES, DEPT PHYS, KENSINGTON 2033, NEW S WALES, AUSTRALIA
关键词
D O I
10.1016/0039-6028(76)90321-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
引用
收藏
页码:349 / 364
页数:16
相关论文
共 23 条
[1]   HEAVY-ION SPUTTERING YIELD OF SILICON [J].
ANDERSEN, HH ;
BAY, HL .
JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) :1919-1921
[2]  
ANDERSON N, 1973, PHYS LETT A, V35, P19
[3]  
BAYLY AR, TO BE PUBLISHED
[4]   On the extraction of electrons from a metal surface by ions and metastable atoms [J].
Cobas, A ;
Lamb, WE .
PHYSICAL REVIEW, 1944, 65 (11/12) :327-336
[6]   MEASUREMENTS OF SPUTTER RATE OF FUSED SILICA BOMBARDED BY ARGON IONS OF ENERGY 12-32-KEV [J].
EDWIN, RP .
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1973, 6 (07) :833-&
[7]  
ERSHOV OA, 1967, FIZ TVERD TELA+, V8, P1699
[8]   THEORY OF AUGER EJECTION OF ELECTRONS FROM METALS BY IONS [J].
HAGSTRUM, HD .
PHYSICAL REVIEW, 1954, 96 (02) :336-365
[9]   RESONANCE, AUGER, AND AUTOIONIZATION PROCESSES INVOLVING HE+(2S) AND HE++ NEAR SOLID SURFACES [J].
HAGSTRUM, HD ;
BECKER, GE .
PHYSICAL REVIEW B, 1973, 8 (01) :107-121
[10]   LOW-ENERGY ION-SCATTERING SPECTROMETRY (ISS) OF SIO2-SI INTERFACE [J].
HARRINGTON, WL ;
HONIG, RE ;
GOODMAN, AM ;
WILLIAMS, R .
APPLIED PHYSICS LETTERS, 1975, 27 (12) :644-645