QUANTIFICATION OF AMORPHOUS SIC-H FILMS USING XPS AND AES WITH 3 STANDARDS

被引：8

作者：

FITZGERALD, AG

HENDERSON, AE

HICKS, SE

MOIR, PA

STOREY, BE

机构：

来源：

SURFACE AND INTERFACE ANALYSIS | 1989年 / 14卷 / 6-7期

关键词：

D O I：

10.1002/sia.740140614

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：376 / 380

页数：5

共 13 条

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[6] COMPUTER-AIDED QUANTIFICATION OF AES AND XPS SPECTRA [J].

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STOREY, BE .

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[7]

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