SEMICONDUCTOR CRYSTAL-GROWTH BY SPUTTER DEPOSITION

[71] SPUTTER-DEPOSITED FILMS FOR DISPLAY DEVICES [J]. THIN SOLID FILMS, 1972, 13 (02) : 407 - 412

[72] FRITZSCHE H, 1952, Z PHYS B, V22, P422

[73] EJECTION OF MOLECULAR CLUSTERS FROM ION-BOMBARDED SURFACES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 789 - 792

[74] MASS-SPECTROMETRY OF NEUTRAL MOLECULES SPUTTERED FROM POLYCRYSTALLINE METALS BY AR+-IONS OF 100-1000 EV [J]. ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1975, 22 (01): : 41 - 48

[75] GERHARD W, 1975, Z PHYS B CON MAT, V22, P31, DOI 10.1007/BF01325457

[76] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[77] GLANG R, 1965, 3 T INT VAC C, P643

[78] CADMIUM SELENIDE SPUTTERED FILMS [J]. THIN SOLID FILMS, 1977, 46 (01) : 59 - 67

[79] Greene J.E., 1980, HDB SEMICONDUCTORS, VIII

[80] STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF INSB THIN-FILMS GROWN BY RF SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (08) : 3630 - 3639

[71] SPUTTER-DEPOSITED FILMS FOR DISPLAY DEVICES [J]. THIN SOLID FILMS, 1972, 13 (02) : 407 - 412

[72] FRITZSCHE H, 1952, Z PHYS B, V22, P422

[73] EJECTION OF MOLECULAR CLUSTERS FROM ION-BOMBARDED SURFACES [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02): : 789 - 792

[74] MASS-SPECTROMETRY OF NEUTRAL MOLECULES SPUTTERED FROM POLYCRYSTALLINE METALS BY AR+-IONS OF 100-1000 EV [J]. ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1975, 22 (01): : 41 - 48

[75] GERHARD W, 1975, Z PHYS B CON MAT, V22, P31, DOI 10.1007/BF01325457

[76] THE PENETRATION OF POSITIVE IONS OF LOW ENERGY INTO ALLOYS AND COMPOSITION CHANGES PRODUCED IN THEM BY SPUTTERING [J]. JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS, 1959, 11 (1-2) : 55 - &

[77] GLANG R, 1965, 3 T INT VAC C, P643

[78] CADMIUM SELENIDE SPUTTERED FILMS [J]. THIN SOLID FILMS, 1977, 46 (01) : 59 - 67

[79] Greene J.E., 1980, HDB SEMICONDUCTORS, VIII

[80] STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF INSB THIN-FILMS GROWN BY RF SPUTTERING [J]. JOURNAL OF APPLIED PHYSICS, 1976, 47 (08) : 3630 - 3639