CONTRAST FORMATION MECHANISM FOR THE SURFACE-DEFECTS IMAGED BY X-RAY TOPOGRAPHY UNDER THE CONDITION OF SIMULTANEOUS SPECULAR AND BRAGG-REFLECTIONS

被引：12

作者：

KITANO, T

KIMURA, S

ISHIKAWA, T

机构：

[1] NEC CORP LTD,MICROELECT RES LABS,TSUKUBA,IBARAKI 305,JAPAN

[2] UNIV TOKYO,DEPT APPL PHYS,BUNKYO KU,TOKYO 113,JAPAN

来源：

APPLIED PHYSICS LETTERS | 1992年 / 60卷 / 02期

关键词：

D O I：

10.1063/1.107438

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

X-ray topography using extremely asymmetric diffraction under the specular reflection condition is effective for imaging a short-range strain field near the surface. This experimental condition is easily realized by utilizing the tunability of synchrotron radiation. The surface defect images are clearly observed as a result of the reduction of background due to dynamical diffraction from the highly perfect bulk crystal.

引用

页码：177 / 179

页数：3

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