EFFECTS OF SUBSTRATE MATERIAL ON DIAMOND GROWTH FROM CO-H2 PLASMA

被引:12
作者
SAITO, Y [1 ]
SATO, K [1 ]
MATUDA, S [1 ]
KOINUMA, H [1 ]
机构
[1] TOKYO INST TECHNOL,ENGN MAT RES LAB,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN
关键词
D O I
10.1007/BF01130193
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Diamond synthesis from CO-H2 plasma has been carried out on various substrate materials, e.g. metals: nickel, cobalt, tungsten, molybdenum, copper and ceramics: SiC, SiO2, Al2O3, ZrO2, AlN. Diamond formation was confirmed on every substrate with the exception of cobalt and nickel. The highest density of diamond nucleation, over 10(8) cm-2, was obtained on amorphous SiO2, the carbide-forming metals tungsten and molybdenum and on SiC; on these the nucleation density was one order of magnitude higher than on the other substrates. Diamond films prepared on tungsten, molybdenum and SiC substrates had a strong adhesion force: 1.3 to 1.5 kg mm-2.
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页码:2441 / 2444
页数:4
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