UNIFIED APPROACH TO THE TEMPORAL EVOLUTION OF SURFACE PROFILES IN SOLID ETCH AND DEPOSITION PROCESSES

被引：13

作者：

GALLATIN, GM

ZAROWIN, CB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 12期

关键词：

D O I：

10.1063/1.343184

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5078 / 5088

页数：11

共 26 条

[1]

Bender CM, 1978, ADV MATH METHODS SCI, P484

[2] MEASUREMENT OF RMS ROUGHNESS, AUTOCOVARIANCE FUNCTION AND OTHER STATISTICAL PROPERTIES OF OPTICAL SURFACES USING A FECO SCANNING INTERFEROMETER [J].

BENNETT, JM .

APPLIED OPTICS, 1976, 15 (11) :2705-2721

[3] A MONTE-CARLO MICROTOPOGRAPHY MODEL FOR INVESTIGATING PLASMA REACTIVE ION ETCH PROFILE EVOLUTION [J].

COTLER, TJ ;

BARNES, MS ;

ELTA, ME .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1988, 6 (02) :542-550

[4] MODELING PROJECTION PRINTING OF POSITIVE PHOTORESISTS [J].

DILL, FH ;

NEUREUTHER, AR ;

TUTTLE, JA ;

WALKER, EJ .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, ED22 (07) :456-464

[5]

Feynman R.OP., 1964, FEYNMAN LECTURES PHY, VII, P6

[6] LINE-PROFILE RESIST DEVELOPMENT SIMULATION TECHNIQUES [J].

JEWETT, RE ;

HAGOUEL, PI ;

NEUREUTHER, AR ;

VANDUZER, T .

POLYMER ENGINEERING AND SCIENCE, 1977, 17 (06) :381-384

[7]

KERN DP, 1980, IBM RC8503 RES REP

[8] ON A PROPERTY OF A CLASSICAL SOLUTION OF THE NONLINEAR MASS-TRANSPORT EQUATION UT=UXX/1+UX2 [J].

KITADA, A .

JOURNAL OF MATHEMATICAL PHYSICS, 1986, 27 (05) :1391-1392

[9] INSTABILITIES AND PATTERN-FORMATION IN CRYSTAL-GROWTH [J].

LANGER, JS .

REVIEWS OF MODERN PHYSICS, 1980, 52 (01) :1-28

[10]

LANGER JS, 1984, PHASE TRANSFORMATION, P129

← 1 2 3 →