UNIFIED APPROACH TO THE TEMPORAL EVOLUTION OF SURFACE PROFILES IN SOLID ETCH AND DEPOSITION PROCESSES

被引：13

作者：

GALLATIN, GM

ZAROWIN, CB

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 12期

关键词：

D O I：

10.1063/1.343184

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5078 / 5088

页数：11

共 26 条

[11]

MOREAU WM, 1988, SEMICONDUCTOR LITHOG, pCH13

[12] 2-DIMENSIONAL MOTION OF IDEALIZED GRAIN BOUNDARIES [J].

MULLINS, WW .

JOURNAL OF APPLIED PHYSICS, 1956, 27 (08) :900-904

[13] STABILITY OF PLANAR INTERFACE DURING SOLIDIFICATION OF DILUTE BINARY ALLOY [J].

MULLINS, WW ;

SEKERKA, RF .

JOURNAL OF APPLIED PHYSICS, 1964, 35 (02) :444-&

[14] MORPHOLOGICAL STABILITY OF A PARTICLE GROWING BY DIFFUSION OR HEAT FLOW [J].

MULLINS, WW ;

SEKERKA, RF .

JOURNAL OF APPLIED PHYSICS, 1963, 34 (02) :323-&

[15] FLATTENING OF A NEARLY PLANE SOLID SURFACE DUE TO CAPILLARITY [J].

MULLINS, WW .

JOURNAL OF APPLIED PHYSICS, 1959, 30 (01) :77-83

[16] THEORY OF THERMAL GROOVING [J].

MULLINS, WW .

JOURNAL OF APPLIED PHYSICS, 1957, 28 (03) :333-339

[17] MODELING ION MILLING [J].

NEUREUTHER, AR ;

LIU, CY ;

TING, CH .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1767-1771

[18] EXPERIMENTAL-STUDY OF SCATTERING FROM CHARACTERIZED RANDOM SURFACES [J].

ODONNELL, KA ;

MENDEZ, ER .

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1987, 4 (07) :1194-1205

[19] CAVERNOUS UNDERCUTS APPEARING IN REACTIVE ION ETCHED SUBMICRON-WIDE DEEP TRENCHES [J].

OHKI, S ;

ODA, M ;

AKIYA, H ;

SHIBATA, T .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (06) :1611-1616

[20] SIMULATION OF DRY ETCHED LINE EDGE PROFILES [J].

REYNOLDS, JL ;

NEUREUTHER, AR ;

OLDHAM, WG .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (06) :1772-1775

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