BLOW-OFF OF ALUMINUM FILMS

被引:37
作者
SCHULTZE, V [1 ]
WAGNER, M [1 ]
机构
[1] UNIV JENA,INST FESTKORPERPHYS,O-6900 JENA,GERMANY
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1991年 / 53卷 / 03期
关键词
D O I
10.1007/BF00324259
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The blow-off of Al targets from a transparent support by single pulses of intense laser irradiation through the support is investigated for target thicknesses up to some mu-m. The blow-off process is theoretically described by calculations of the phase front dynamics in the target, adopted from Harrach's analytical solutions for laser heating and burnthrough of opaque solid slabs. Experimentally two laser beam sources were used: a Nd:YAG laser with a Gaussian intensity profile and a Nd:Glass-laser system with a homogenized flat-top profile. Two types of removal mechanism could be identified. In the first mode (low laser intensities and/or thin targets) the target is completely molten and can easily be blown-off by the vapor originating at the target-support interface. In the second mode (high laser intensities and/or thick targets) superheating of the liquid Al or a burst of the remaining solid layer of the target occurs. In both cases in the second mode the blow-off process is characterized by higher vapor pressures.
引用
收藏
页码:241 / 248
页数:8
相关论文
共 25 条
[1]   A STUDY OF THE MECHANISM OF METAL-DEPOSITION BY THE LASER-INDUCED FORWARD TRANSFER PROCESS [J].
ADRIAN, FJ ;
BOHANDY, J ;
KIM, BF ;
JETTE, AN ;
THOMPSON, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1987, 5 (05) :1490-1494
[2]   ELLIPSOMETRIC AND X-RAY SPECULAR REFLECTION STUDIES ON NATURALLY GROWN OVERLAYERS ON ALUMINUM THIN-FILMS [J].
BARNA, PB ;
BODO, Z ;
GERGELY, G ;
CROCE, P ;
ADAM, J ;
JAKAB, P .
THIN SOLID FILMS, 1984, 120 (04) :249-256
[3]  
BASEMAN RJ, 1988, MATER RES SOC S P, V100, P627
[4]  
BLOEMBERGEN N, 1987, REV MOD PHYS 2, V59, pS119
[5]   METAL-DEPOSITION AT 532-NM USING A LASER TRANSFER TECHNIQUE [J].
BOHANDY, J ;
KIM, BF ;
ADRIAN, FJ ;
JETTE, AN .
JOURNAL OF APPLIED PHYSICS, 1988, 63 (04) :1158-1162
[6]   METAL-DEPOSITION FROM A SUPPORTED METAL-FILM USING AN EXCIMER LASER [J].
BOHANDY, J ;
KIM, BF ;
ADRIAN, FJ .
JOURNAL OF APPLIED PHYSICS, 1986, 60 (04) :1538-1539
[7]   LASER-INDUCED OPTICAL-RECORDING IN THIN-FILMS - MODELING OF THE HOLE OPENING AND EXPERIMENTS WITH ORGANIC SUBLAYERS [J].
BROER, DJ ;
VRIENS, L .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1983, 32 (03) :107-123
[8]   ONE-DIMENSIONAL STEADY-STATE MODEL FOR DAMAGE BY VAPORIZATION AND LIQUID EXPULSION DUE TO LASER-MATERIAL INTERACTION [J].
CHAN, CL ;
MAZUMDER, J .
JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4579-4586
[9]  
DANS J, 1949, TASCHENBUCH CHEM PHY, P757
[10]   LASER TRIMMING OF NICR THIN-FILM RESISTORS .2. THIN-FILM RESISTORS WITH AN SIO2 PROTECTIVE LAYER [J].
FISCHER, A ;
SCHULTZE, V .
THIN SOLID FILMS, 1989, 182 :35-45