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EFFECT OF WATER-VAPOR ON THE GROWTH OF TEXTURED ZNO-BASED FILMS FOR SOLAR-CELLS BY DC-MAGNETRON SPUTTERING

被引：92
作者：
NAKADA, T
OHKUBO, Y
KUNIOKA, A
机构：
[1] Department of Electrical Engineering and Electronics, Aoyama Gakuin University, Setagaya-ku, Tokyo
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1991年 / 30卷 / 12A期
关键词：
ZINC OXIDE FILMS; ALUMINUM-DOPED ZINC OXIDE FILMS; SPUTTERING; TRANSPARENT CONDUCTING FILMS; SOLAR CELLS; WATER VAPOR;
D O I：
10.1143/JJAP.30.3344
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Large-grain zinc oxide (ZnO) films have been deposited on glass substrates by DC magnetron sputtering in H2O-Ar mixtures at elevated substrate temperatures. The (002)-oriented columnar structure grown in pure Ar changed into the granular structure as the partial pressure of water vapor increased. Low-resistivity pyramidal textured ZnO:Al films were sputter-deposited in a mixture of H2O-Ar(1:1) at 300-400-degrees-C. The 2-mu-m-thick films possessed a sheet resistance of 9-OMEGA/square and optical transmission of 80% at 550 nm after annealing in a vacuum. These films have considerable potential as window materials for solar cells.
引用
收藏
页码：3344 / 3348
页数：5
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