THE STABILITY OF ZINC-OXIDE TRANSPARENT ELECTRODES FABRICATED BY RF MAGNETRON SPUTTERING

被引：121

作者：

MINAMI, T

NANTO, H

SHOOJI, S

TAKATA, S

机构：

来源：

THIN SOLID FILMS | 1984年 / 111卷 / 02期

关键词：

D O I：

10.1016/0040-6090(84)90484-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：167 / 174

页数：8

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