ZNO/SIO2/SI DIAPHRAGM BULK ACOUSTIC-WAVE COMPOSITE RESONATORS

被引：1

作者：

MIYASAKA, Y

HOSHINO, S

TAKAHASHI, S

机构：

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1984年 / 23卷

关键词：

D O I：

10.7567/JJAPS.23S1.119

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：119 / 121

页数：3

共 12 条

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[6] ZNO-SIO2-DIAPHRAGM COMPOSITE RESONATOR ON A SILICON-WAFER [J].

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[9]

ONO S, 1977, WAVE ELECTRON, V3, P35

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