MULTILAYER TITANIUM NITRIDE AND SILICIDE STRUCTURES SYNTHESIZED BY MULTIPULSE EXCIMER LASER IRRADIATION

被引：13

作者：

DANNA, E

LEGGIERI, G

LUCHES, A

MARTINO, M

PERRONE, A

MENGUCCI, P

MIHAILESCU, IN

机构：

[1] UNIV ANCONA,DEPT MAT & EARTH SCI,I-60100 ANCONA,ITALY

[2] INST ATOM PHYS,BUCHAREST,ROMANIA

来源：

APPLIED SURFACE SCIENCE | 1992年 / 54卷

关键词：

D O I：

10.1016/0169-4332(92)90070-E

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We report a study of the formation of titanium nitride/titanium silicide multistructure layers on silicon single crystals covered with thin (140 and 400 nm) titanium films, by single step multipulse (100 to 5000) XeCl excimer laser irradiation in N2 atmosphere at a moderate laser fluence (approximately 0.6 J/cm2) and a pulse repetition rate of 50 Hz. After irradiation the samples were submitted to different investigations: optical and electron microscopy, surface resistivity, Rutherford backscattering spectrometry and nuclear reaction analysis. It is shown that the thickness of the silicide and nitride layers can be adjusted by a proper choice of the number of subsequent laser pulses. Optical spectroscopy investigations and temperature profile calculations indicate that titanium nitride is formed at the sample surface through a liquid-phase reaction.

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收藏

页码：353 / 357

页数：5

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