NITRIDATION OF TITANIUM BY MULTIPULSE EXCIMER LASER IRRADIATION

被引：14

作者：

DANNA, E

LEGGIERI, G

LUCHES, A

MARTINO, M

DRIGO, AV

MAJNI, G

MENGUCCI, P

MIHAILESCU, IN

机构：

[1] UNIV LECCE,DEPT MAT SCI,I-73100 LECCE,ITALY

[2] UNIV ANCONA,DEPT MAT & EARTH SCI,I-60131 ANCONA,ITALY

[3] CENT INST PHYS,R-76900 BUCHAREST,ROMANIA

来源：

APPLIED SURFACE SCIENCE | 1990年 / 46卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(90)90171-U

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

We report a study of the formation of nitride surface layers on titanium foils by multipulse (100 to 2500) XeCl excimer laser (λ = 308 nm) irradiation in N2 and NH3 atmosphere. After irradiation the samples were analyzed by Rutherford backscattering spectroscopy (RBS) and nuclear reaction analysis (NRA) and then examined by electron microscopy (SEM, TEM). The nitridation process was shown to be very efficient with both gases. The amount of nitride has been observed to depend on the number of subsequent laser pulses, on the pulse repetition rate and on the nature of the ambient gas. © 1990.

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页码：365 / 370

页数：6

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