ELECTRICAL TRANSPORT, OPTICAL-PROPERTIES, AND STRUCTURE OF TIN FILMS SYNTHESIZED BY LOW-ENERGY ION ASSISTED DEPOSITION

被引：93

作者：

SAVVIDES, N

WINDOW, B

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1988年 / 64卷 / 01期

关键词：

D O I：

10.1063/1.341468

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：225 / 234

页数：10

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共 54 条

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[4] SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .1. EXPERIMENTAL APPROACH
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[5] SYNTHESIS OF COMPOUND THIN-FILMS BY DUAL ION-BEAM DEPOSITION .2. PROPERTIES OF ALUMINUM-NITROGEN FILMS
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[6] EFFECTS OF SUBSTRATE-TEMPERATURE AND SUBSTRATE MATERIAL ON THE STRUCTURE OF REACTIVELY SPUTTERED TIN FILMS
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[J]. THIN SOLID FILMS, 1984, 122 (02) : 115 - 129
[7] HINDERMAN HE, 1984, J VAC SCI TECHNOL B, V2, P816
[8] LOW-ENERGY ION IRRADIATION DURING FILM GROWTH FOR REDUCING DEFECT DENSITIES IN EPITAXIAL TIN(100) FILMS DEPOSITED BY REACTIVE-MAGNETRON SPUTTERING
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HELMERSSON, U
BARNETT, SA
SUNDGREN, JE
GREENE, JE
[J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (02) : 552 - 555
[9] THIN-FILM OPTICAL-PROPERTIES IN RELATION TO FILM STRUCTURE
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[J]. THIN SOLID FILMS, 1979, 57 (01) : 15 - 32
[10] THE EFFECTS OF SUBSTRATE BIAS ON THE STRUCTURAL AND ELECTRICAL-PROPERTIES OF TIN FILMS PREPARED BY REACTIVE RF SPUTTERING
IGASAKI, Y
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[J]. THIN SOLID FILMS, 1980, 70 (01) : 17 - 25

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