KINETICS OF NITRIDE FORMATION ON TITANIUM TARGETS DURING REACTIVE SPUTTERING

被引：115

作者：

SUNDGREN, JE

JOHANSSON, BO

KARLSSON, SE

机构：

来源：

SURFACE SCIENCE | 1983年 / 128卷 / 2-3期

关键词：

D O I：

10.1016/S0039-6028(83)80031-4

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：265 / 280

页数：16

相关论文

共 39 条

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[8] MECHANISMS OF REACTIVE SPUTTERING OF INDIUM .3. A GENERAL PHENOMENOLOGICAL MODEL FOR REACTIVE SPUTTERING
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