ROUGHENING OF SI (111) SURFACE UNDER HIGH-TEMPERATURE THERMAL CYCLING

被引：31

作者：

ZUO, JK

HARPER, RA

WANG, GC

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 04期

关键词：

D O I：

10.1063/1.98463

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：250 / 252

页数：3

共 21 条

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