USE OF A SPUTTERED SIO2 COATING FOR SURFACE PROTECTION DURING LEAKY TUBE DIFFUSION OF ZN INTO GAAS

被引：4

作者：

EDWARDS, JL

ROEDEL, RJ

机构：

来源：

ELECTRONICS LETTERS | 1983年 / 19卷 / 23期

关键词：

D O I：

10.1049/el:19830654

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：962 / 963

页数：2

共 9 条

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[2] ON EARLY STAGE DEGRADATION IN ZN DIFFUSED GAAS LED [J].

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[4] CONTROLLED ZN DIFFUSION FOR LOW THRESHOLD NARROW STRIPE GAALAS-GAAS DH LASERS [J].

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[6]

SHORTES SR, 1964, T METALL SOC AIME, V230, P300

[7]

SPRINGTHORPE AJ, 1983, I PHYS C SER, V65, P589

[8] SHALLOW DIFFUSION OF ZINC INTO GAAS FOR OPTICAL-WAVEGUIDE MODULATORS [J].

TADA, K ;

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YAMANE, K .

THIN SOLID FILMS, 1981, 83 (02) :289-293

[9]

TUCK B, 1974, INTRO DIFFUSION SEMI, P180

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