MECHANICAL STRESSES IN (SUB)MONOLAYER EPITAXIAL-FILMS

被引:154
作者
SCHELLSOROKIN, AJ
TROMP, RM
机构
关键词
D O I
10.1103/PhysRevLett.64.1039
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We have studied stresses in thin Ge growing on Si(001), in situ and in real time, with submonolayer sensitivity. As a result of the 4.3% lattice mismatch, Ge films develop a compressive stress in the 2D growth regime, which saturates when 3D growth sets in. These measurements give new insight in the interatomic forces that play a dominant role in establishing growth mode and the generation of defects, and provide a new test for state-of-the-art total-energy calculations. © 1990 The American Physical Society.
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页码:1039 / 1042
页数:4
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